Analiza utjecajnih veličina na mjerenje parametara topografije površine kod primjene mikroskopa atomskih sila

master's thesis

• Title (english): The analysis of influencing factors on the measurement of surface topography parameters using the atomic force microscope
• Author: Mateo Carević
• Mentor: Biserka Runje (mentor)
• Mentor: Amalija Horvatić Novak (komentor)
• Granter: University of Zagreb; Faculty of Mechanical Engineering and Naval Architecture; Zagreb
• Defense date and country: 2020-11-26, Croatia
• Scientific / art field, discipline and subdiscipline: TECHNICAL SCIENCES; Mechanical Engineering; Precision Mechanical Engineering

Abstract

Topografija površine svih materijala uključuje tri osnovne komponente. Te komponente su hrapavost, nepravilnost površine (valovitost) i odstupanje od oblika. Kako bi se ispitala topografija površine nekog materijala na nanorazini, neizbježna je upotreba mikroskopa atomskih sila (AFM). Mikroskop atomskih sila pripada grupi mikroskopa s ticalima i radi na principu raster skeniranja površine uzoraka ticalom oštrog vrha. AFM ima mogućnost skeniranja površine uzorka kontaktnim načinom, beskontaktnim načinom ili isprekidajućim načinom rada.
U prvom dijelu ovog rada detaljno je opisan rad i primjena mikroskopa atomskih sila. U drugom dijelu rada, s ciljem analize topografije površine, provedena su mjerenja mikroskopom atomskih sila odabranog uzorka s različitim ulaznim parametrima. Topografija površine uzorka na dobivenim slikama analizirana je i obrađena probnom verzijom programa za obradu slika – Mountains SPIP. Analiziran je utjecaj ulaznih veličina skeniranja na površinske parametre topografije rezultata mjerenja propisane normom ISO 25178-2:2012. Za analizu i statističku obradu podataka korišten je program Minitab 19 (probna verzija). Eksperimentalni dio rada proveden je na Fakulteta strojarstva i brodogradnje Sveučilišta u Zagrebu.

Abstract (english)

Surface topography of all materials includes three basic components. These components are roughness, surface irregularity (waviness) and deviation from shape. In order to examine surface topography of a material at nanoscale level, the use of Atomic force microscope (AFM) is inevitable. The AFM belongs to the group of microscopes with probe and works on the principle of raster scanning of the surface of samples with a sharp-tipped probe. AFM has the ability to scan samples surface by contact mode, non-contact mode or tapping mode. When analyzing the topography of the surface, a number of influential parameters appear on the measurement results, and this will be more detailed analyzed in this paper.
The first part of this paper describes in detail the operation and application of the atomic force microscope. In the second part of the paper, with the aim of analyzing the surface topography, measurements of a selected sample with different input parameters were performed by the atomic force microscope. The topography of the sample surface on the obtained images was analyzed and processed by a trial version of the image processing program – Mountains SPIP. The influence of scan input values on surface parameters of topography of measurement results prescribed by ISO 25178-2: 2012 standard was analyzed. Minitab 19 (trial version) was used for analysis and statistical data processing. The experimental part of the work was performed at the Faculty of Mechanical Engineering and Naval Architecture, University of Zagreb.

• Keywords: mikroskop atomskih sila; topografija površine; utjecajne veličine
• Keywords (english): Atomic force microscope; surface topography; influential quantities
• Language: croatian
• URN:NBN: urn:nbn:hr:235:017499
• Study programme: Title: Mechanical Engineering; Study programme type: university; Study level: graduate; Academic / professional title: magistar/magistra inženjer/inženjerka strojarstva (magistar/magistra inženjer/inženjerka strojarstva)
• Type of resource: Text
• File origin: Born digital
• Access conditions: Open access
• Repository: Repository of Faculty of Mechanical Engineering and Naval Architecture University of Zagreb
• Created on: 2020-11-26 20:45:32